Search results for "thin-film deposition technique"

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Review Article: Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"

2017

gas-solid reactionsemiconductor manufacturingatomsta114thin-film deposition techniqueposter presentationsvirtual projectsinorganic materialssoviet unionta216depositionunited kingdomsemiconductor device manufactureJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

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PEPhysical Sciences and Engineering
- PE2Fundamental Constituents of Matter
  - PE2_1Theory of fundamental interactions
  - PE2_2 Phenomenology of fundamental interactions
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  - PE2_6Nuclear, hadron and heavy ion physics
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  - PE2_7Nuclear and particle astrophysics
  - PE2_9 Electromagnetism
  - PE2_10Atomic, molecular physics
  - PE2_11Ultra-cold atoms and molecules
  - PE2_18Equilibrium and non-equilibrium statistical mechanics: steady states and dynamics
  - PE2_14Lasers, ultra-short lasers and laser physics
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  - PE2_13Quantum optics and quantum information
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- PE1Mathematics
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  - PE1_4 Algebraic and complex geometry
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  - PE1_17Mathematical aspects of computer science
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  - PE3_2Mechanical and acoustical properties of condensed matter, lattice dynamics
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  - PE3_5Physical properties of semiconductors and insulators
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  - PE3_7Spintronics
  - PE3_9 Condensed matter – beam interactions (photons, electrons, etc.)
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  - PE3_14Fluid dynamics (physics)
  - PE3_15Statistical physics: phase transitions, condensed matter systems, models of complex systems, interdisciplinary applications
  - PE3_16Physics of biological systems
- PE5Synthetic Chemistry and Materials
  - PE5_1Structural properties of materials
  - PE5_2Solid state materials chemistry
  - PE5_3Surface modification
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  - PE4_10Heterogeneous catalysis
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  - PE4_14Radiation and Nuclear chemistry
  - PE4_16Corrosion
  - PE4_17Characterisation methods of materials
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  - PE7_11Components and systems for applications (in e.g. medicine, biology, environment)
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  - PE10_4Terrestrial ecology, land cover change
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  - PE10_3Climatology and climate change
  - PE10_16Ozone, upper atmosphere, ionosphere
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  - PE10_18Cryosphere, dynamics of snow and ice cover, sea ice, permafrosts and ice sheets
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  - PE11_8Engineering of alternative established or emergent materials
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  - PE11_10Soft materials engineering, e.g. gels, foams, colloids
  - PE11_11Porous materials engineering, e.g. covalent-organic, metal-organic, porous aromatic frameworks
  - PE11_12Semi-conducting and magnetic materials engineering
  - PE11_13Metamaterials engineering
  - PE11_14Computational methods for materials engineering
LSLife Sciences
- LS1Molecules of Life: Biological Mechanisms, Structures and Functions
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  - LS1_1Macromolecular complexes including interactions involving nucleic acids, proteins, lipids and carbohydrates
  - LS1_3DNA and RNA biology
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  - LS1_11Chemical biology
  - LS1_12Protein design
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  - LS1_14Innovative methods and modelling in molecular, structural and synthetic biology
  - LS1_10Synthetic biology
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  - LS1_7Molecular biophysics, biomechanics, bioenergetics
- LS2Integrative Biology: from Genes and Genomes to Systems
  - LS2_1Genetics
  - LS2_3Epigenetics
  - LS2_2Gene editing
  - LS2_4Gene regulation
  - LS2_5Genomics
  - LS2_6Metagenomics
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  - LS2_9Metabolomics
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  - LS2_11Bioinformatics and computational biology
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  - LS4_1Organ and tissue physiology and pathophysiology
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- LS3Cell Biology, Development, Stem Cells and Regeneration
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  - LS3_17Theoretical modelling in cellular, developmental and regenerative biology
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- LS5Neuroscience and Disorders of the Nervous System
  - LS5_1Neuronal cells
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  - LS5_10Ageing of the nervous system
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  - LS5_12Mental disorders
  - LS5_7Sensory systems, sensation and perception, including pain
  - LS5_13Nervous system injuries and trauma, stroke
  - LS5_14Repair and regeneration of the nervous system
  - LS5_15Neuroimmunology, neuroinflammation
  - LS5_16Systems and computational neuroscience (e.g. modelling, simulation, brain oscillations, connectomics)
  - LS5_18Innovative methods and tools for neuroscience
  - LS5_17Imaging in neuroscience
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  - LS5_6Neurovascular biology and blood-brain barrier
  - LS5_8Neural basis of behaviour (e.g. sleep, consciousness, addiction)
  - LS5_4Neural stem cells
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  - LS6_1Innate immunity
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  - LS8_15Theoretical developments and modelling in environmental biology, ecology, and evolution
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  - LS9_3Bioengineering of cells, tissues, organs and organisms
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  - LS9_4Microbial biotechnology and bioengineering
  - LS9_5Food biotechnology and bioengineering
  - LS9_6Marine biotechnology and bioengineering
  - LS9_7Environmental biotechnology and bioengineering
  - LS9_8Applied plant sciences, plant breeding, agroecology and soil biology
  - LS9_10Veterinary and applied animal sciences
  - LS9_9Plant pathology and pest resistance
  - LS9_11Biomass production and utilisation, biofuels
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  - LS9_1Bioengineering for synthetic and chemical biology
SHSocial Sciences and Humanities
- SH2Institutions, Governance and Legal Systems
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